cella solare Si PERC (wafer Czochralski)

flowchart LR czochralskiPull["tiratura ingot mono-Si Czochralski"] waferSawing["taglio wafer filo diamantato + texturing"] waferDopingDiffusion["diffusione POCl3 + coating PECVD SiNx"] cellMetallization["screen printing Ag + firing + test cella"] czochralskiPull --> waferSawing waferSawing --> waferDopingDiffusion waferDopingDiffusion --> cellMetallization in_silicon(["silicio"]):::input in_silicon --> czochralskiPull out_siliconIngot(["lingotto Si monocristallino (Czochralski)"]):::output czochralskiPull --> out_siliconIngot in_siliconIngot(["lingotto Si monocristallino (Czochralski)"]):::input in_siliconIngot --> waferSawing out_siliconWafer(["wafer Si (180 μm)"]):::output waferSawing --> out_siliconWafer in_siliconWafer(["wafer Si (180 μm)"]):::input in_siliconWafer --> waferDopingDiffusion in_phosphorylChloride(["ossicloruro di fosforo POCl3"]):::input in_phosphorylChloride --> waferDopingDiffusion out_dopedSiWafer(["wafer Si drogato n (POCl3)"]):::output waferDopingDiffusion --> out_dopedSiWafer in_dopedSiWafer(["wafer Si drogato n (POCl3)"]):::input in_dopedSiWafer --> cellMetallization in_silverPaste(["pasta argento (contatto frontale)"]):::input in_silverPaste --> cellMetallization out_solarCell(["cella solare Si fotovoltaica (PERC ~22%)"]):::output cellMetallization --> out_solarCell classDef input fill:#e8f4ff,stroke:#06c classDef output fill:#e8ffe8,stroke:#0a7

PREFIX chem: <https://ontology.siletto.it/chem-pipeline#>
SELECT ?role ?substance WHERE {
  ?substance chem:playsRole ?ra .
  ?ra chem:role ?role ; chem:inPipeline chem:solarCellPipeline .
} ORDER BY ?role